Mode-localized (ML) MEMS resonators have been widely investigated for sensing applications in a variety of fields for its high sensitivity and robustness against ambient effects. However, due to its intrinsic properties and defects during fabrication, the resolution of ML resonator doesn’t show advantages over conventional MEMS resonator using frequency shift as output.
This seminar presents a cascaded hybrid resonator structure based on ML resonator, which shows the same behavior as ML resonator and can achieve the same resolution as conventional single resonator with frequency shift output in theory. The working principle of ML and cascaded resonator will be introduced during in the seminar, as well as the benefits of cascaded resonator compared with ML resonator: better tunability, better resolution across the measurement range, and more compatible with driving and readout circuit. The structure of a CMOS self-oscillating sensing circuit for cascaded hybrid resonator will also be introduced.
31/10/2025 11:00 - 12:00
ESAT Aula L
